Parker UHP金属垫片面密封件（最大1英寸）– VacuSeal
Parker Fittings接头 Face Seal Fittings
UHP Metal Gasket Face Seal Fitting (sizes up to 1 inch) – VacuSeal

Parker VacuSeal 面密封接头设计用于超高纯度气体分配系统。这些配件具有出色的可靠性和泄漏完整性，是清洁度至关重要的半导体制造应用的理想选择。VacuSeal 金属垫片端面密封接头具有极高的泄漏完整性，使其适用于需要超高纯度条件的关键应用，例如半导体工具连接器，阀歧管盒（VMB）和气体分配系统。配件具有配合垫圈和环形设计，可形成金属对金属的密封，并提供从9000 psig的真空无泄漏的服务。

VacuSeal 接头的尺寸从1/8到1英寸不等，并提供多种阀体和压盖配置。它们在Veriflo专有的Vericlean 低硫316L不锈钢制成的100级无尘室中制造。标准的5 Ra电抛光润湿表面光洁度可减少截留面积，同时具有出色的耐腐蚀性。压盖可用高纯度镍和HastelloyC-22 制成，以确保在腐蚀性极强的应用中的性能和可靠性。

VacuSeal 配件设计用于与平面和Verfilo的TorqTite自对准端面密封垫片一起使用，该垫片无需安装工具，并消除了因热循环和振动而导致的零件松动。TorqTite 还可以确保密封，即使在损坏的环形表面上也是如此，并允许施加极高的扭矩而不会损坏密封表面。这与VacuSeal?配件的超高纯度结构材料相结合，可最大程度地减少颗粒的产生，并确保在清洁度至关重要的晶圆制造过程中的泄漏完整性。

UHP Metal Gasket Face Seal Fitting (sizes up to 1 inch) – VacuSeal
Parker UHP金属垫片面密封件（最大1英寸）– VacuSeal

VacuSeal Face Seal Fittings are designed for ultra-high purity gas distribution systems. The fittings offer excellent reliability and leak integrity and are ideal for use in semiconductor manufacturing applications where cleanliness is critical. VacuSeal Metal Gasket Face Seal Fittings provide extremely high leak integrity, making them suitable for use in critical applications where ultra-high purity conditions are required, such as semiconductor tool hook-ups, valve manifold boxes (VMBs), and gas distribution systems. The fittings feature a mating gasket and toroid design, creating a metal-to-metal seal and affording leak-free service from vacuum up to 9000 psig. VacuSeal fittings range from 1/8 to 1 inch in size and come available in a variety of body and gland configurations. They are fabricated in a Class 100 cleanroom from Veriflo's proprietary Vericlean? low sulfur, 316L stainless steel. The standard 5 Ra, electropolished wetted surface finish reduces entrapment areas while offering exceptional corrosion resistance. Glands are available in high-purity nickel and Hastelloy C-22 to ensure performance and reliability in extremely corrosive applications.

VacuSeal fittings are designed to work with flat and Verfilo's TorqTite? self-aligning face seal gaskets, which require no tools for installation and eliminate component loosening due to thermocycling and vibration. TorqTite? also ensures sealing, even on damaged toroids and allows for the application of extremely high torque without risk of damage to the sealing surface. This, coupled with the VacuSeal? fittings' ultra-high purity materials of construction, minimizes particle generation and ensures leak integrity in wafer manufacturing operations where cleanliness is of the utmost importance.

All VacuSeal fittings are Helium leak tested to ensure performance and reliability in demanding UHP applications.

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