Parker 316L Stainless Steel Metal Gasket Face Seal Fittings
Parker Fittings接头 Tube Fittings
UHP金属面密封接头 - UHP Metal Face Seal Fittings

派克316L不锈钢金属垫片面密封配件专为超高纯度半导体应用而设计。组装后，环形面在真空或正压条件下形成密封的金属对金属连接。派克Veriflo的SEMI F20材料等级的UHP金属端面密封配件，压盖，盖帽和螺母可提供经济高效的解决方案，并确保派克的质量，可靠性和性能。 派克金属密封件专为要求超高纯度条件的关键应用而设计。配合垫圈和环形设计提供了高完整性的金属对金属密封，可实现从真空到正压的可靠服务。标准的金属表面密封件的内表面平均粗糙度为10英寸。（0.25mm）Ra。PE精加工配件的内部表面平均粗糙度为5英寸。（0.13m）Ra和UHP润湿的表面状况。 Parker使用获得专利的TorqTite垫圈，该垫圈最初与内锥接触，从而径向压出任何夹带的污染物，并且平滑过渡到内径中可以最大程度地减少截留面积。 UHP金属面密封件生产线使Parker能够以有竞争力的价格在晶圆厂应用中竞争，并补充了Parker当前的VacuSeal和Mini buttweld生产线，后者的坚固设计最适合半导体工具的关键应用。

Parker 316L Stainless Steel Metal Gasket Face Seal Fittings
UHP Metal Face Seal Fittings

Parker 316L Stainless Steel Metal Gasket Face Seal Fittings are made for use in ultra high purity semiconductor applications. When assembled, the toroid face forms a leak-tight metal-to-metal connection in vacuum or positive pressure conditions .Parker Veriflo's SEMI F20 material grade UHP Metal Face Seal Fittings, Glands, Caps & Nuts provide cost effective solutions and guarantee Parker's quality, reliability and performance. Parker Metal Face Seal Fittings are designed for critical applications where ultrahigh purity conditions are required. The mating gasket and toroid design provide a high integrity metal-to-metal seal for reliable service from vacuum to positive pressure. Standard finish metal face seal fittings have an internal surface roughness average of 10 ?in. (0.25?m) Ra. PE finished fittings have an internal surface roughness average of 5 ?in. (0.13?m) Ra and UHP wetted surface condition. Parker uses a Patented TorqTite? gasket that initially contacts on the inner taper, radially forcing out any entrapped contaminants, and a smooth transition into the Internal Diameter minimizes entrapment areas. The UHP Metal Face Seal Fittings line allows Parker to compete in fab applications at a competitive price point and complements Parker's current VacuSeal and Mini buttweld lines whose robust design works best for critical applications at the semiconductor tool.

市场：
- 半导体制造Semiconductor Fabrication

特征/优点：
- 紧凑的设计允许系统小型化和紧密耦合的间距
- 通过在每个接液部件上永久标记的热代码，可追溯材料
- 永久性的产品名称（如果适用）标识制造商，材料和内部表面处理
- 增强的母螺母镀银促进一致的易于组装
- 受控的润湿表面通过防止脱气和抑制腐蚀来满足严格的超高纯系统要求
- 专利的Torqtite?垫圈促进密封损坏的环形几乎消除了由于振动或热循环而引起的组件松动的

应用：
- 工具连接
- 阀箱
- 气柜

Markets:
- Semiconductor Fabrication

Features/Benefits:
- Compact Design allows for system miniaturization and close coupled spacing
- Material traceability via permanently marked heat codes on each wetted component
- Permanent product designation identifies manufacturer, material and internal finish when applicable
- Enhanced female nut silver plating promotes consistent easy assembly
- Controlled wetted surfaces meet stringent ultra high purity system requirements by preventing outgassing and inhibiting corrosion
- Patented Torqtite? gasket promotes sealing of damaged toroids and virtually eliminates assembly loosening due to vibration or thermo-cycling

Applications:
- Tool Hook-Up
- Valve Manifold Boxes
- Gas Cabinets

Technical Specifications

UHP Metal Face Seal Fittings 型号