Parker PFA阀 Parker PFA Valves UHP Fluoropolymer ultra clean valves
Ultra High Purity Fluoropolymer PFA Valves - 22 Series

UHP 含氟聚合物超洁净阀门由 PFA 和 PTFE 制成，适用于半导体液体应用，包括高浓度酸和碱、透明化学品和浆料。这些新型、超洁净、含氟聚合物、手动和气动阀可提供更大的流量并提供更好的阀座密封，从而增强无泄漏性能，从而提高安全性。它们旨在以可用的最小包装提供最高流量。计算流体动力学软件被用来最大化通过这些阀门的流量。这些超洁净阀门适用于半导体液体应用，包括高浓度酸和碱、透明化学品和浆液。其他要求严苛的市场可以使用这些阀门，因为它们具有清洁度和承载高腐蚀性化学品的能力。

UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.

22 Series PFA Valves Quarter Inch

22 Series PFA Valves Half Inch

1" and 1-1/4" 22 Series Valves Ultra High Purity 22 Series Valves UHP Fluoropolymer Valves

市场：
- 半导体加工
- 化学加工
- 分析设备
- 实验室

功能/优点：
- 在酸和浆液中的循环寿命长
- 占地面积小，采用真正的锁定、挂牌设计 (LOTO)
- 双点密封提供双倍密封能力（正在申请专利）
- 光滑的孔和完全扫过的路径，最大限度地减少颗粒截留面积并防止停滞
- 100% 泄漏测试
- 符合 SEMI-F57-0301 标准

主要应用：
- 化学机械抛光 (CMP) 浆料
- 超高纯度工艺
- 用于半导体工艺的透明化学品 - 搅拌
系统
- 清洁系统

Markets:
- Semiconductor processing
- Chemical Processing
- Analytical Equipment
- Laboratory

Features/Benefits:
- High cycle life in acids and slurry
- Compact footprint with a true lock-out, tag-out design (LOTO)
- Dual point seal provides double the sealing power (patent pending)
- Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
- 100% leak tested
- Meets SEMI-F57-0301 Standards

Key Applications:
- Chemical Mechanical Polishing (CMP) Slurries
- Ultra high purity processes
- Clear chemistries for semiconductor processes
- Blender systems
- Cleaning systems

Technical Specifications

Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series 型号

相关文件
文献和参考资料
22 系列 PFA 阀门半英寸
22系列PFA阀门一英寸

1/2" and 1-3/4" 22 Series Valves Ultra High Purity 22 Series Valves UHP Fluoropolymer Valves
1/4" and 1-3/8" 22 Series Valves Ultra High Purity 22 Series Valves UHP Fluoropolymer Valves
1" and 1-1/4" 22 Series Valves Ultra High Purity 22 Series Valves UHP Fluoropolymer Valves